LEO Gemini 1530 Scanning Electron Microscope
The LEO Gemini 1530 is a dedicated imaging microscope allowing a high sample throughput with a yet excellent image quality. It´s low-kV capability allows to inspect non-conductive samples without the need for a conductive coating prior to the examination. Furthermore, the in-lens SE detector yields good image contrast at simultaneously extremely low beam currents.
|Acceleration Voltage:||0.1 … 30 kV|
|Gun type:||Schottky FEG|
|Specified point resolution:||1.0 nm (@ 30 kV and WD = 4 mm)|
|Detectors:||InLens (SE), Everhart-Thornley|
|Holders:||8x-holder, cross section holder|